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 Freescale Semiconductor Technical Data
MMA6700EG Rev 0, 09/2008
High Accuracy Low g Inertial Sensor
MEMS Sensing, State Machine ASIC
The MMA6700EG series is a dual axis, Low g, XY-axis sensor based on Freescale's HARMEMS technology with an embedded DSP ASIC allowing for additional processing of the digital or analog signals. Features * * * XY-axis of sensitivity in one device 10- or 11-bit digital data output 3.5 g or 5 g full-scale range per axis - MMA6700EG: 3.5 g (11-bit data sensitivity = 3.43 mg/digit typical at 25 C) - MMA6701EG: 5 g (11-bit data sensitivity = 4.91 mg/digit typical at 25C) SPI-compatible serial interface Bidirectional internal self-test On-chip temperature sensor and voltage regulator Support for signed or unsigned output data Selection of integrated signal conditioning low-pass filters Capture/hold input for system-wide synchronization support 3.3 V or 5 V single supply operation Ratiometric analog voltage output Traceability through programmable registers, 3 8-bit. Customer-assigned one-time-programmable Registers (2 8-bit Registration) Minimal external component requirements Wide operating temperature range from -40C to +125C 20-pin SOIC wide-body RoHS-compliant package Minimum external components, 4 capacitors
MMA6700EG MMA6701EG
DUAL AXIS LOW g INERTIAL SENSOR
IMI
Package SOIC-20, Tape and Reel SOIC-20, Tape and Reel SOIC-20, Tape and Reel SOIC-20, Tape and Reel
* * * * * * * * * * * * * *
NA
RY
N/C N/C XOUT VSSA YOUT CAP/HOLD DIN VPP/TEST CREG CS/RESET 1 2 3 4 5 6 7 8 9
X = -1g Y = 0g
EG SUFFIX (Pb-free) 20-LEAD SOIC CASE 475A-02
PIN CONNECTIONS
20 19 18 17 16 15 14 13 12 11 N/C N/C CREGA CREGA CREF CREF VCC VSS DOUT SCLK
Typical Applications *
EL
Case No. 475A-02 475A-02 475A-02 475A-02
*
With a +3.5 g or +5 g full scale range, the newly designed, high accuracy sensor enables electronic stability control (ESC) designers to accommodate higher original signal noise level without sacrificing resolution. Tilt Measurement
10
20-PIN SOIC PACKAGE N/C: NO INTERNAL CONNECTION
ORDERING INFORMATION
Device MMA6700EGR2 MMA6700AEGR2 MMA6701EGR2 MMA6701AEGR2 Temp. Range
X = 0g Y = 1g
- 40 to +125C - 40 to +125C - 40 to +125C - 40 to +125C
PR
X = 1g Y = 0g
X = 0g Y = -1g
This document contains a product under development. Freescale Semiconductor reserves the right to change or discontinue this product without notice.
(c) Freescale Semiconductor, Inc., 2008. All rights reserved.
BLOCK DIAGRAM
V /TEST PP V CC CREG CREGA CREGA CREF CREF V SS V SSA Voltage Regulator
Unit Programmable Data Array
Oscillator Reference Primary Internal Clock Clock Monitor
RY
SPI IN 1 TEMP
DIN /ST DOUT /STATUS SCLK CS CAP/HOLD
Control Logic
SELF-TEST INTERFACE
GCELL (Y)
SIGNAL CONVERTER
TEMP SENSOR GCELL (X)
IMI
IN 2
NA
CONTROL IN DSP BLOCK Y OUT X OUT
STATUS OUT DIGITAL OUT DAC DAC YOUT XOUT
SIGNAL CONVERTER
MMA6700EG Preliminary 2 Sensors Freescale Semiconductor
PR
EL
Figure 1. Block Diagram
MAXIMUM RATINGS
Rating Supply Voltage CREG, CREGA , VREF VPP/TEST SCLK, CS, DIN/ST,CAP/HOLD DOUT/STATUS (high impedance state) XOUT,YOUT (DACEN=0) Current Drain Per Pin Excluding VCC and VSS Powered Shock (six sides, 0.5 ms duration) Unpowered Shock (six sides, 0.5 ms duration) Drop Shock (to concrete surface Electrostatic Discharge Human Body Model (HBM) Charge Device Model (CDM) Machine Model (MM Storage Temperature Range Symbol VCC VREG VPP VIN VOUT VDAC I Value -0.3 to 7.0 -0.3 to 3.0 -0.3 to 11.0 -0.3 to VCC + 0.3 -0.3 to VCC + 0.3 -0.3 to VCC + 0.3 10 +1500 +2000 1.2 +2000 +500 +200 Unit Vdc Vdc Vdc Vdc Vdc Vdc mAmps g g m V V V C
NA
Tstg
PR
EL
IMI
MMA6700EG Sensors Freescale Semiconductor Preliminary 3
RY
gpms gshock hdrop VESD VESD VESD
-40C to +125C
PERFORMANCE CHARACTERISTICS
Parameter Supply Voltage Standard Operating Voltage, 3.3 V Standard Operating Voltage, 5V Operating Temperature Range TA Supply Current Standard Operating Voltage, 5.0 V (Digital with Analog Enabled) Programming Voltage Applied to VPP/TEST Programming Current Applied to VPP/TEST Test Mode Activation Voltage Applied to VPP/TEST Measurement Range, XY axis Digital Sensitivity (DOUT) Analog Sensitivity (XOUT, YOUT) Ratiometric to VCC Sensitivity Error (DOUT) TA = +25C -40C < TA < +105C +105C < TA < +125C Offset at 0g, SPI. 11-Bit unsigned data Analog Output Offset Error at 0g, SPI, 11-Bit Unsigned Data TA = +25C -40C < TA < +125C Offset Error at 0g, analog output TA = +25C -40C < TA < +125C DSP Low-Pass Filter (2nd or 4th Order Selectable) Filter Option $00, $13 Filter Option $01, $14 Filter Option $03, $16 Filter Option $02, $15 Filter Option $04, $17 Filter Option $06, $19 Filter Option $05, $18 Filter Option $07 Filter Option $1A Cross- Axis Sensitivity SPI Clock Rate Noise (1Hz - 1kHz) Idd VPP IPP Symbol VCC VCC Min VL +3.15 +4.75 TL -40 +7.5 Typ +3.3 +5.0 +8.0 MAX VH +3.45 +5.25 TH +125 +9.5 +8.5 160 +7.5 +3.5 UNITS V V C mAmp V mAmp V g mg/digit mV/V/g
VTEST g
NA
SENS SENS SENS SENS DOUT AOUT DOUT DOUT AOUT AOUT -3.0 -4.0 -6.0 -
SENS
RY
+6.5 -3.5 +7.2
-
3.43 115
1024 0.5VCC 8.8 13.1 44.1 50.0 66.1 70.0 88.3 100 141 -
+3.0 +4.0 +6.0 -
% % % Digit V Digit Digit Digit Digit Hz Hz Hz Hz Hz Hz Hz Hz Hz % MHz g/Hz k pF
IMI
fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) tSCLK nSD ZOUT COUT
-15 -22 -3 -5
+15 +22 +3 +5 9.2 13.8 46.3 52.5 69.4 73.5 92.7 105 148 +4.0 140 35
EL
PR
8.4 12.4 41.9 47.5 62.8 66.5 83.9 95 134 -4.0 8.33 47 -
Output Loading (DOUT/STATUS) Load Resistance Load Capacitance
MMA6700EG Preliminary 4 Sensors Freescale Semiconductor
EXTERNAL COMPONENTS
The MMA6700EG requires minimum external components. Aside from a supply bypass capacitor, two 1 F capacitors provide filtering for the internal analog and digital power supply rails, while a third, 100 nF filter capacitor is required for the internal voltage reference. This circuit configuration is illustrated in Figure 2. Redundant pins are provided for the internal voltage reference and analog supply rails. In safety critical applications, these pins may be connected to separate external capacitors to guard against circuit malfunction in the event of a fault such as an open filter capacitor connection. An internal monitor detects an open digital supply rail filter capacitor condition, which puts the device into reset should this fault occur.
MMA6700EG
0.1uF 1uF 1uF 1uF 0.1uF
Figure 2. Recommended External Component Configuration
PR
EL
IMI
MMA6700EG Sensors Freescale Semiconductor Preliminary 5
NA
V SSA V SS
RY
CREG CREGA CREGA CREF CREF 0.1uF
V CC
V CC
PACKAGE DIMENSIONS
PACKAGE DIMENSIONS
MMA62XXEG
Sensors Freescale Semiconductor
Preliminary 6
PACKAGE DIMENSIONS
MMA62XXEG
Preliminary 7
Sensors Freescale Semiconductor
How to Reach Us:
Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. Technical Information Center, EL516 2100 East Elliot Road Tempe, Arizona 85284 1-800-521-6274 or +1-480-768-2130 www.freescale.com/support Europe, Middle East, and Africa: Freescale Halbleiter Deutschland GmbH Technical Information Center Schatzbogen 7 81829 Muenchen, Germany +44 1296 380 456 (English) +46 8 52200080 (English) +49 89 92103 559 (German) +33 1 69 35 48 48 (French) www.freescale.com/support Japan: Freescale Semiconductor Japan Ltd. Headquarters ARCO Tower 15F 1-8-1, Shimo-Meguro, Meguro-ku, Tokyo 153-0064 Japan 0120 191014 or +81 3 5437 9125 support.japan@freescale.com Asia/Pacific: Freescale Semiconductor China Ltd. Exchange Building 23F No. 118 Jianguo Road Chaoyang District Beijing 100022 China +86 10 5879 8000 support.asia@freescale.com For Literature Requests Only: Freescale Semiconductor Literature Distribution Center P.O. Box 5405 Denver, Colorado 80217 1-800-441-2447 or +1-303-675-2140 Fax: +1-303-675-2150 LDCForFreescaleSemiconductor@hibbertgroup.com
Information in this document is provided solely to enable system and software implementers to use Freescale Semiconductor products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Freescale Semiconductor reserves the right to make changes without further notice to any products herein. Freescale Semiconductor makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Freescale Semiconductor assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters that may be provided in Freescale Semiconductor data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals", must be validated for each customer application by customer's technical experts. Freescale Semiconductor does not convey any license under its patent rights nor the rights of others. Freescale Semiconductor products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Freescale Semiconductor product could create a situation where personal injury or death may occur. Should Buyer purchase or use Freescale Semiconductor products for any such unintended or unauthorized application, Buyer shall indemnify and hold Freescale Semiconductor and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Freescale Semiconductor was negligent regarding the design or manufacture of the part. FreescaleTM and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. (c) Freescale Semiconductor, Inc., 2008. All rights reserved.
RoHS-compliant and/or Pb-free versions of Freescale products have the functionality and electrical characteristics of their non-RoHS-compliant and/or non-Pb-free counterparts. For further information, see http:/www.freescale.com or contact your Freescale sales representative. For information on Freescale's Environmental Products program, go to http://www.freescale.com/epp. MMA6700EG Rev. 0 09/2008


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